The mechanisms of charge and charge compensation are discussed : we suggest electron stimulated desorption ( esd ) at the surface and inner defects induced by the electron beam bombardment are main reasons of charge 對ys - zro2樣品加熱到230 ,使其表面充電得到改善。本文討論了在電子束輻照下, al2o3 、 sio2 、 ys - zro2等氧化物材料的充電機制,以及氧環(huán)境的充電補償機制。